JPH057533Y2 - - Google Patents

Info

Publication number
JPH057533Y2
JPH057533Y2 JP1986104410U JP10441086U JPH057533Y2 JP H057533 Y2 JPH057533 Y2 JP H057533Y2 JP 1986104410 U JP1986104410 U JP 1986104410U JP 10441086 U JP10441086 U JP 10441086U JP H057533 Y2 JPH057533 Y2 JP H057533Y2
Authority
JP
Japan
Prior art keywords
thin plate
base
thickness
measuring
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986104410U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310410U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986104410U priority Critical patent/JPH057533Y2/ja
Publication of JPS6310410U publication Critical patent/JPS6310410U/ja
Application granted granted Critical
Publication of JPH057533Y2 publication Critical patent/JPH057533Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP1986104410U 1986-07-07 1986-07-07 Expired - Lifetime JPH057533Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986104410U JPH057533Y2 (en]) 1986-07-07 1986-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986104410U JPH057533Y2 (en]) 1986-07-07 1986-07-07

Publications (2)

Publication Number Publication Date
JPS6310410U JPS6310410U (en]) 1988-01-23
JPH057533Y2 true JPH057533Y2 (en]) 1993-02-25

Family

ID=30977878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986104410U Expired - Lifetime JPH057533Y2 (en]) 1986-07-07 1986-07-07

Country Status (1)

Country Link
JP (1) JPH057533Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193671U (ja) * 1982-06-17 1983-12-23 富士通株式会社 ホト作図機
JPS5919847A (ja) * 1982-07-26 1984-02-01 Seiko Instr & Electronics Ltd 標準サンプルの位置決め方法
JPS6051553U (ja) * 1983-09-16 1985-04-11 凸版印刷株式会社 自動作図装置

Also Published As

Publication number Publication date
JPS6310410U (en]) 1988-01-23

Similar Documents

Publication Publication Date Title
KR100260116B1 (ko) 프로우브 장치
JP4435328B2 (ja) 基板の試験方法
JP3163221B2 (ja) プローブ装置
US6014886A (en) Gauge block holder apparatus
JPH11111787A (ja) ウエハ用検査装置
JPH057533Y2 (en])
JP3124659B2 (ja) 平面度測定装置の較正方法
JPH057532Y2 (en])
JP2968956B2 (ja) 厚みおよび／または反り測定装置とその使用方法
JPH0443774Y2 (en])
JP2001358184A (ja) ウエハプローバ及びそれを用いた回路の測定方法
CN217132123U (zh) 一种平面度测量装置
JPH0835805A (ja) 有頂筒状をなすワークにおける頂壁の厚さ検査方法
JP2834076B2 (ja) ウェハプローバ
KR100287684B1 (ko) 허브 및 드럼의 계측장치
CN208671906U (zh) 一种用于三坐标测量仪的薄板变形测量支架
KR20240010203A (ko) 쿨링 플레이트 검사 장치
JP2000065502A (ja) 壜開口部の測定装置
CN219301475U (zh) 一种凹凸透镜夹具、凹凸透镜中心厚度的测量装置
JPH01227448A (ja) ウエハプローバ
JPH08162509A (ja) プロ−ブ装置およびプロ−ブ方法
CN221484438U (zh) 一种壳体内孔同轴度检测装置
CN223272049U (en) Adjusting tool for testing residual stress of bearing part by X-ray diffraction
KR19990076333A (ko) 반도체 검사장비의 수평측정장치
CN222670949U (zh) 一种测量零件端面与内孔垂直度的量具